Since the beginning of Project No. 2/EEZLV02/14/AK/010/005 supervised by State Regional Development agency(VRAA) «Create the energy-efficient technology to produce polycrystalline silicon» a number of works have been conducted, which shall enable obtaining of silicon rods with parameters in accordance with requirements of power microelectronics in the process of ingot pulling with electron beam heating
– Purity of heated module has been enhanced at experimental furnace and assessment of empirical coefficients, which determine dependencies between dimensions of heated module and pulled rod, was carried out
– Work with patents in order to reveale the most efficient ways of electron beam trajectory alteration outside the heater has been done, which shall enable minimization of influence of vacuum volume of the heaters on vacuum volume containing pulled rod
